Sample preparation equipment refers to equipment used for the preparation of physical specimens for subsequent microscopy or related disciplines - including failure analysis and quality control. The equipment includes the following types of machinery:

• Precision cross-sectioning saws
• Precision lapping & polishing machines
• Selected Area Preparation Systems
• Decapsulation machinery (using mechanical, chemical/ 'jet etching' acid, laser and plasma methodologies)
• Focused ion beam (FIB) systems
• Anti-reflective coating systems
• Dimpling equipment
• Sputter coating equipment
• Carbon and metal evaporation systems

Each of these system types incorporates a wealth of accessories and consumable items which fit the particular system for a specific application.

• Article from MATERIALS WORLD Journal discussing the various sample preparation disciplines that allow for failure analysis of electronic materials and components
• Article from ULTRA TEC Web-site discussing the backside sample preparation of a packaged electronic device that allow for (through silicon) backside analysis
• Article discussing the applications of jet etch equipment