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David Attwood (physicist)

David T. Attwood
Alma materNew York University
Known forX-ray optics
EUV lithography
Scientific career
InstitutionsUC Berkeley
Lawrence Berkeley National Laboratory

David Attwood is an American physicist and professor emeritus at the University of California, Berkeley, where he worked in the field of synchrotron radiation[1] and free-electron lasers, developing X-ray microscopy[2] techniques for research and for the industry (EUV lithography[3]). He is the author of a reference book on soft X-rays and extreme ultraviolet radiation.[4]

Education and career

David Attwood received his Ph.D. in Applied Physics from New York University in 1972.[5] After his Ph.D, he joined Lawrence Livermore National Laboratory to work on laser fusion.[6] He was the first scientific director of the Advanced Light Source (1985–1988) and the founding director of the Center for X-Ray Optics at Lawrence Berkeley National Laboratory, where he pioneered EUV lithography. He co-founded the Applied Science and Technology (AS&T) program within the college of engineering at UC Berkeley and supervised over twenty grad students,[7] among who Regina Soufli and Anne Sakdinawat. He is a Fellow of the American Physical Society.

References

  1. ^ Attwood, D.; Halbach, K.; Kim, K.-J. (1985). "Tunable Coherent X-rays". Science. 228 (4705): 1265–1272. doi:10.1126/science.228.4705.1265. PMID 17799101. S2CID 27975164.
  2. ^ Chao, Weilun; Harteneck, Bruce D.; Liddle, J. Alexander; Anderson, Erik H.; Attwood, David T. (2005). "Soft X-ray microscopy at a spatial resolution better than 15 nm". Nature. 435 (7046): 1210–1213. doi:10.1038/nature03719. PMID 15988520. S2CID 4314046.
  3. ^ Gwyn, C. W. (1998). "Extreme ultraviolet lithography". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 16 (6): 3142. doi:10.1116/1.590453.
  4. ^ Attwood, David (1999). Soft X-Rays and Extreme Ultraviolet Radiation. Cambridge University Press Press. ISBN 9781139164429.
  5. ^ David Attwood – Department of Electrical Engineering and Computer Sciences at UC Berkeley
  6. ^ Attwood, D. T. (May 19, 1978). "Diagnostics for the laser fusion program: plasma physics on the scale of microns and picoseconds". OSTI 6683562 – via www.osti.gov.
  7. ^ David Attwood – UC Berkeley
Quelle: http://en.wikipedia.org/wiki/David_Attwood_(physicist)