Eisspeedway

File:SALELE at a glance.png

SALELE_at_a_glance.png (299 × 149 pixels, file size: 2 KB, MIME type: image/png)

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Summary

Description
English: Self-aligned litho-etch-litho-etch (SALELE) involves the use of spacers (grey) to help align trenches (red) patterned after earlier trenches (blue). The trenches are cut at different stages (yellow, purple). [1][2]
Date
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Author Guiding light

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References

  1. ↑ SALELE double patterning for 7nm and 5nm nodes
  2. ↑ Y. Drissi et al., Proc. SPIE 10962, 109620V (2019).

Captions

Plan view of SALELE process steps, taken together

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Wikimedia username: Guiding light
author name string: Guiding light
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24 March 2021

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current01:08, 24 March 2021Thumbnail for version as of 01:08, 24 March 2021299 × 149 (2 KB)Guiding lightUploaded own work with UploadWizard

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Quelle: https://en.wikipedia.org/wiki/File:SALELE_at_a_glance.png