File:2D Layout Decomposition.png
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Summary
| Description | English: A composite target layout (top) is split into two sub-layouts: vertical dense lines (blue) and horizontal sparse and dense lines (red) due to the incompatibility of the illuminations used for each sub-layout,[1] when the dense pitch is less than wavelength divided by numerical aperture. The sparse lines require on-axis illumination, while dense lines require off-axis illumination.[2][3] On the other hand, with off-axis illumination, it is desirable to apply subresolution assist features for the sparse horizontal lines.[4] So the layout splitting allows this due to extra spaces between lines while the original composite doesn't. Furthermore, the tip-to-tip (T2T) features (circled) also need to be controlled well, but are inherently the wrong orientation, requiring the use of additional cut exposures, as it is not possible to fit assist features. |
| Date | |
| Source | Excel drawing |
| Author | Guiding light |
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Licensing
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Original upload log
Transferred from en.wikipedia to Commons using For the Common Good.
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 13:28, 11 September 2018 | 480 × 1,364 (18,271 bytes) | w:en:Guiding light (talk | contribs) | |
| 11:43, 11 September 2018 | 480 × 1,364 (17,502 bytes) | w:en:Guiding light (talk | contribs) | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
References
- ↑ M. Eurlings et al., Proc. SPIE 4404, 266 (2001).
- ↑ J. Bekaert et al., Solid State Tech., Nov. 2007, p. 48.
- ↑ M. van de Kerkhof et al., Proc. SPIE 10143, 101430D (2017).
- ↑ R. J. Socha et al., Proc. SPIE 4000, 1140 (2000).
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 00:32, 5 February 2019 | | 547 × 1,393 (22 KB) | Guiding light | Color added, T2T highlighted |
| 23:55, 29 September 2018 |  | 480 × 1,364 (18 KB) | OgreBot | (BOT): Reverting to most recent version before archival | |
| 23:55, 29 September 2018 |  | 480 × 1,364 (17 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-09-11 11:43:13 by Guiding light | |
| 00:42, 28 September 2018 |  | 480 × 1,364 (18 KB) | Arlene the bean | Transferred from en.wikipedia: see original upload log above |
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